SPTS Technologies
SPTS Technologies provides wafer processing solutions to semiconductor and microelectronic device manufacturers. The company designs, manufactures, sells, and supports etch, PVD, CVD, and MVD capital equipment.
- Plasma Etch
- Metal Deposition
- Process Training
- Customer Support
- Single Wafer Platforms
- Molecular Vapor Deposition (MVD)
- Plasma Enhanced Chemical Vapor Deposition (PECVD)